Emission Spectroscopy Analysis of Carbonaceous Molecules Involved in Dust Particle Growth by Plasma
| Autor: | Safa Labidi, Erik von Wahl, Jean-François Lagrange, Thomas Lecas, Holger Kersten, titaina gibert, Maxime Mikikian |
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| Přispěvatelé: | Groupe de recherches sur l'énergétique des milieux ionisés (GREMI), Université d'Orléans (UO)-Centre National de la Recherche Scientifique (CNRS), Institut für Experimentelle und Angewandte Physik [Kiel] (IEAP), Christian-Albrechts-Universität zu Kiel (CAU) |
| Jazyk: | angličtina |
| Rok vydání: | 2015 |
| Předmět: | |
| Zdroj: | Diagnostics and Simulation of Dusty Plasmas, 4th International Workshop (DSDP4) Diagnostics and Simulation of Dusty Plasmas, 4th International Workshop (DSDP4), Sep 2015, Kiel, Germany 20th International Colloquium on Plasma Processes (CIP 2015) 20th International Colloquium on Plasma Processes (CIP 2015), Jun 2015, Saint-Etienne, France HAL |
| Popis: | International audience; Dusty plasmas are found in many astrophysical environments such as comet tails, planetary nebulae and rings or in fusion devices like the future ITER. In industrial and laboratory reactors, these dust particles become a huge problem, particularly in microelectronics. However, these particles could be used in many industrial applications related to nanotechnology. So it’s important to study the production of these solid particles.In GREMI laboratory, several methods are used to create dust particles in a plasma. They are mainly based on reactive gases or material sputtering. In this work, experiments are performed in a capacitively-coupled RF discharge in the PKE-Nefedov reactor, where dust particles are grown by sputtering a polymer layer in Ar or Kr plasmas. The polymer layer is previously deposited on the electrodes. Dust particle growth is analyzed by using optical emission spectroscopy in order to study more precisely the spatial and temporal evolutions of the molecules involved in this process like: C2, CN, CH, CO. When dust particles are growing in the plasma, a laser at 685 nm is also used to highlight their presence. Their localization is determined by recording the scattered light with the spectrometer. Other tools are used to follow dust particle growth like a CCD camera and measurements of the discharge current. |
| Databáze: | OpenAIRE |
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