Sacrificial membranes for serial valving in Microsystems
| Autor: | Allain, M., Jean (Charles) Berthier, Basrour, S., Pouteau, P. |
|---|---|
| Přispěvatelé: | Torella, Lucie, Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés (TIMA), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS), Laboratoire d'Electronique et des Technologies de l'Information (CEA-LETI), Université Grenoble Alpes (UGA)-Direction de Recherche Technologique (CEA) (DRT (CEA)), Techniques of Informatics and Microelectronics for integrated systems Architecture (TIMA), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA) |
| Jazyk: | angličtina |
| Rok vydání: | 2009 |
| Předmět: | |
| Zdroj: | Proc. of Nanotech 2009 Conference Nanotech 2009 Conference Nanotech 2009 Conference, May 2009, Houston, TX, United States. pp.343-346 Scopus-Elsevier |
| Popis: | ISBN 978-1-4398-1784-1; International audience; Valving is essential to microflow circuits in microsystem technology. Many different types of valves have already been designed. Membranes of sacrificial materials have been studied for one shot valving; however, the new design proposed here, based on sacrificial micro-membranes with embedded electrodes, has the advantages to more efficient than the previous existing devices, to produce calibrated openings, to be easy to pilot and to connect easily successively, one by one, a series of initially isolated micro-chambers of a silicon chip. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|