Hydrogen atom sources; hydrogen kinetics, anomalous recombination and possible relevance to deposition
| Autor: | Graaf, de, M.J., Severens, R.J., Qing, Z., Dahiya, R P, Otorbaev, D.K., Meulenbroeks, R.F.G., Sanden, van de, M.C.M., Schram, D.C., Bonizzoni, G., Hooke, W., Sindoni, E. |
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| Přispěvatelé: | Plasma & Materials Processing |
| Jazyk: | angličtina |
| Rok vydání: | 1993 |
| Zdroj: | Industrial applications of plasma physics : proceedings of the course and workshop held at Villa Monastero-Varenna, Italy, 2-11 September 1992, 495-496 STARTPAGE=495;ENDPAGE=496;TITLE=Industrial applications of plasma physics : proceedings of the course and workshop held at Villa Monastero-Varenna, Italy, 2-11 September 1992 |
| Popis: | A method is proposed for prodn. of intense H atom beams (fluences of 4x1021 atoms/s) using subatmospheric cascaded arc plasma with plasma currents up to 100 A. [on SciFinder (R)] |
| Databáze: | OpenAIRE |
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