CVD synthesis and characterization of hexagonal boron nitride thin films
Autor: | Andrieux, A., Dorval, N., Fossard, F., Schué, L., Lavenus, P., Loiseau, A. |
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Přispěvatelé: | ONERA - The French Aerospace Lab [Châtillon], ONERA-Université Paris Saclay (COmUE), ONERA - The French Aerospace Lab [Palaiseau], André, Cécile |
Jazyk: | angličtina |
Rok vydání: | 2014 |
Předmět: | |
Zdroj: | 18th International Microscopy Congress 18th International Microscopy Congress, Sep 2014, PRAGUE, Czech Republic |
Popis: | International audience; h-BN is a wide band gap semiconductor (6.4 eV), which can be synthesized, as graphite, its carbon analog, as bulk crystallites, nanotubes and layers. These structures meet a growing interest for deep UV LED and graphene engineering. However synthesis of high quality BN layers remains a challenge. In this talk, we report on the LPCVD technique we have developed as the versatile synthesis route to BN and BN-Gr layered hetero-structures. |
Databáze: | OpenAIRE |
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