CVD synthesis and characterization of hexagonal boron nitride thin films

Autor: Andrieux, A., Dorval, N., Fossard, F., Schué, L., Lavenus, P., Loiseau, A.
Přispěvatelé: ONERA - The French Aerospace Lab [Châtillon], ONERA-Université Paris Saclay (COmUE), ONERA - The French Aerospace Lab [Palaiseau], André, Cécile
Jazyk: angličtina
Rok vydání: 2014
Předmět:
Zdroj: 18th International Microscopy Congress
18th International Microscopy Congress, Sep 2014, PRAGUE, Czech Republic
Popis: International audience; h-BN is a wide band gap semiconductor (6.4 eV), which can be synthesized, as graphite, its carbon analog, as bulk crystallites, nanotubes and layers. These structures meet a growing interest for deep UV LED and graphene engineering. However synthesis of high quality BN layers remains a challenge. In this talk, we report on the LPCVD technique we have developed as the versatile synthesis route to BN and BN-Gr layered hetero-structures.
Databáze: OpenAIRE