| Autor: |
Koek, W.D., Zwet, E.J. van, Plissi, M., Eschen, M., Piras, D., Neer, P.L.M.J. van, Lans, M.J. van der |
| Jazyk: |
angličtina |
| Rok vydání: |
2019 |
| Předmět: |
|
| Zdroj: |
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019 |
| Popis: |
We have developed a photo thermal acoustic imaging (PTAI)setup and have applied it for the characterization of sub surface features composed of materials which are commonly used in the semiconductor industry. Photo thermal acoustic imaging (PTAI) is a measurement technique that combines the practical advantages of an optical technique (non-contact, charge-free and non-ionizing), with the advantages of a gigahertz-terahertz ultrasound technique such as nanometer scale resolution and a large penetration depth in optically opaque materials. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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