GISAXS studies of nanocavities and defects induced by He and Ne implantation in Si
| Autor: | Babonneau, D., Peripolli, S., Beaufort, M.F., Barbot, J-F., Simon, J.P. |
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| Přispěvatelé: | Science et Ingénierie des Matériaux et Procédés (SIMaP), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut National Polytechnique de Grenoble (INPG)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2007 |
| Předmět: | |
| Zdroj: | 2nd Workshop: GISAXS-an advanced scattering method 2nd Workshop: GISAXS-an advanced scattering method, May 2007, Germany |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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