Design and performance analysis of integrated focusing grating couplers for the transverse-magnetic TM00 mode in a photonic BiCMOS technology

Autor: Georgieva, Galina, Voigt, Karsten, Peczek, Anna, Mai, Christian, Zimmermann, Lars
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Zdroj: Journal of the European Optical Society-Rapid Publications, Vol 16, Iss 1, Pp 1-11 (2020)
ISSN: 1990-2573
Popis: Focusing grating couplers for the excitation of the fundamental transverse-magnetic (TM) mode in integrated silicon photonic waveguides are designed and characterized under the boundary conditions of a photonic BiCMOS foundry. Two types of waveguide geometries are considered – a nanowire and a rib waveguide. Wafer-scale experimental results for nanowire TM grating couplers are in excellent agreement with numerical investigations and demonstrate a robust behavior on the wafer. The mean coupling loss and the 3σ interval are -3.9 ± 0.3 dB. The on wafer variation is three times lower than for the fundamental transverse-electric (TE) polarization. Similarly, the coupling in rib waveguides is examined as well. The results indicate that the rib waveguides require a modified geometry when designed for TM. In general, the nanowire waveguide type is more suitable for TM coupling, showing a stable and repeatable performance.
Databáze: OpenAIRE
Nepřihlášeným uživatelům se plný text nezobrazuje