| Autor: |
Manzardo, O., Michaely, R., Schädelin, F., Herzig, H. P., Noell, W., Overstolz, T., de Rooij, N. F. |
| Jazyk: |
angličtina |
| Rok vydání: |
2007 |
| Předmět: |
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| Popis: |
A lamellar grating interferometer (LGI) realized by silicon micro-machining is presented. The LGI is a binary grating with a variable depth. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon-on-insulator (SOI) technology. It is used as Fourier transform spectrometer (FTS). We have measured an optical path difference maximum of 82 /spl μ/m. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm. A preliminary measurement with a xenon arc lamp is shown. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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