A chopper negative-R Delta-Sigma ADC for audio MEMS sensors

Autor: Nebhen, Jamel, Maris Ferreira, Pietro
Přispěvatelé: Prince Sattam Bin Abdul-Aziz University (PSAU), Laboratoire Génie électrique et électronique de Paris (GeePs), CentraleSupélec-Sorbonne Université (SU)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Maris Ferreira, Pietro
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Zdroj: CMES-COMPUTER MODELING IN ENGINEERING & SCIENCES
CMES-COMPUTER MODELING IN ENGINEERING & SCIENCES, 2021, 130 (2)
Popis: International audience; This paper presents a proposed low-noise and high-sensitivity Internet of Thing (IoT) system based on an M&NEMS microphone. The IoT device consists of an M&NEMS resistive accelerometer associated with an electronic readout circuit, which is a silicon nanowire and a Continuous-Time (CT) ΔΣ ADC. The first integrator of the ΔΣ ADC is based on a positive feedback DC-gain enhancement two-stage amplifier due to its high linearity and low-noise operations. To mitigate both the offset and 1/f noise, a suggested delay-time chopper negative-R stabilization technique is applied around the first integrator. A 65-nm CMOS process implements the CT ΔΣ ADC. The supply voltage of the CMOS circuit is 1.2-V while 0.96-mW is the power consumption and 0.1-mm 2 is the silicon area. The M&NEMS microphone and ΔΣ ADC complete circuit are fabricated and measured. Over a working frequency bandwidth of 20-kHz, the measurement results of the proposed IoT system reach a signal to noise ratio (SNR) of 102.8-dB. Moreover, it has a measured dynamic range (DR) of 108-dB and a measured signal to noise and distortion ratio (SNDR) of 101.3-dB.
Databáze: OpenAIRE