Freeform optics measurements with the NANOMEFOS non-contact measurement machine
| Autor: | Henselmans, R., Cacace, L. A., Ij Kramer, G. F., Rosielle, P. C. J. N., Maarten Steinbuch |
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| Přispěvatelé: | Control Systems Technology, Mechanical Engineering |
| Jazyk: | angličtina |
| Rok vydání: | 2009 |
| Zdroj: | Proceedings of the SPIE Optifab 2009, 11-14 May 2009, Rochester, NY, USA Pure TUe |
| Popis: | The NANOMEFOS non-contact measurement machine for freeform optics has been completed. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt, and a flatness that agrees well with the NMi measurement. |
| Databáze: | OpenAIRE |
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