Silicon surface irradiated by nitrogen laser radiation

Autor: Henč-Bartolić, Višnja, Andreić, Željko, Gracin, Davor, Kunze, Hans-Joachim, Stubičar, Mirko
Přispěvatelé: Filetin, Tomislav
Jazyk: angličtina
Rok vydání: 1997
Předmět:
Zdroj: Fizika A
Volume 6
Issue 2
Fizika A : a journal of experimental and theoretical physics
ISSN: 1330-0008
1333-9125
Popis: Monocrystalline silicon target was irradiated with a nitrogen laser beam (λ = 337 nm, maximum energy density 1.1 J/cm2, pulse duration 6 ns and repetition rate 0.2 Hz). The plasma formed at the silicon surface was observed spetroscopically in air (ne = 3×1018 cm-3, Te = 18 500 K) and in vacuum (ne = 6.5×1017 cm-3, Te = 16 000 K). The irradiated surface in vacuum was studied by a metallographic microscope. Droplets were created at crater edges. Their formation is explained by the hydrodynamical sputtering model.
Monokristalni silicij se ozračivao snopom iz dušik ovog lasera (λ = 337 nm, maksimalna snaga 1.1 J/cm2 , trajanje pulsa 6 ns i frekvencija 0.2 Hz). Plazma nastala na površini silicija se promatrala spektroskopski u zraku (ne = 3 = 1018 cm 3 , Te 18500 K) i u vakuumu (ne = 6 ¬ 5 = 1017 cm 3 , Te = 16000 K). Površina ozračena u vakuumu se proučavala pomoću metalografskog mikroskopa. Opazile su se kapljice oko ruba udubine na siliciju. Nastajanje kapljica se tumači hidrodinamičkim modelom.
Databáze: OpenAIRE