Characterization and fabrication of fully metal-coated scanning near-field optical microscopy SiO2 tips

Autor: Aeschimann, Laure, Akiyama, Terunobu, Staufer, Urs, De Rooij, Nicolaas F, Thiery, Laurent, Eckert, Rolf, Heinzelmann, Harry
Přispěvatelé: Institute of Microtechnology, Université de Neuchâtel (UNINE), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Swiss Ctr Electronics
Jazyk: angličtina
Rok vydání: 2003
Předmět:
Zdroj: Journal of Microscopy
Journal of Microscopy, Wiley, 2003, 209, pp.182-187
ISSN: 0022-2720
1365-2818
Popis: The fabrication of silicon cantilever-based scanning near-field optical microscope probes with fully aluminium-coated quartz tips was optimized to increase production yield. Different cantilever designs for dynamic- and contact-mode force feedback were implemented. Light transmission through the tips was investigated experimentally in terms of the metal coating and the tip cone-angle. We found that transmittance varies with the skin depth of the metal coating and is inverse to the cone angle, meaning that slender tips showed higher transmission. Near-field optical images of individual fluorescing molecules showed a resolution < 100 nm. Scanning electron microscopy images of tips before and after scanning near-field optical microscope imaging, and transmission electron microscopy analysis of tips before and after illumination, together with measurements performed with a miniaturized thermocouple showed no evidence of mechanical defect or orifice formation by thermal effects.
Databáze: OpenAIRE
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