Hybrid Wafers Based on a 'Silicon/PPLN Thin Film' Stack for Optical and Radio-Frequency Applications
| Autor: | Florent Bassignot, Fabien Henrot, Mathieu Chauvet, Ludovic Manuel, Blandine Edouard Guichardaz, Hervé Maillotte, Sylvain Ballandras |
|---|---|
| Přispěvatelé: | Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Frec’N’Sys (Frec’N’Sys) |
| Předmět: |
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph]
[SPI.OTHER]Engineering Sciences [physics]/Other [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics [SPI.MAT]Engineering Sciences [physics]/Materials |
| Zdroj: | Publons HAL International Symposium on the Applications of Ferroelectrics, European Conference on Applications of Polar Dielectrics & Workshop on Piezoresponse Force Microscopy International Symposium on the Applications of Ferroelectrics, European Conference on Applications of Polar Dielectrics & Workshop on Piezoresponse Force Microscopy, Aug 2016, Darmstadt, Germany |
| Popis: | International audience; In this paper, we propose new structures based on “Silicon/PPLN thin film” hybrid wafers for nonlinear-optical and Radio-Frequency applications. This stack is obtained by home-made room-temperature bonding and wafer thinning techniques. Two main wafer bonding techniques have been developed on 3 and 4-inch wafers. The Au/Au bonding for RF applications and the Au/Au/SiO 2 bonding for optical applications. The RF component, an acousto-electric resonator, is based on the electrical excitation of a PPLN thin film. The piezoelectric effect of the lithium niobate material is used to excite acoustic waves in the PPLN. The optical device is a second harmonic generation based on a waveguide defined by a ridge in the PPLN thin film. The concept, the fabrication process and the characterizations of these ones are presented in this paper. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|