Simple production of membrane-based LiNbO 3 micro-modulators with integrated tapers
| Autor: | Courjal, Nadège, Caspar, Alexis, Calero Vila, Venancio, Ulliac, Gwenn, Suarez, Miguel Angel, GUYOT, Clément, Artajona, Maria |
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| Přispěvatelé: | Femto-st, Optique, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), iXBlue Photonics (iXBlue Photonics) |
| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: | |
| Zdroj: | Optics Letters Optics Letters, Optical Society of America-OSA Publishing, 2016, 41 (21), pp.5110-5113 |
| ISSN: | 0146-9592 1539-4794 |
| Popis: | International audience; We report on free-standing electro-optical LiNbO3 waveguideswith integrated tapers made by optical grade dicing.Membranes with a calibrated thickness are producedsimultaneously with tapers acting as spot-size converters.Thereby, thicknesses from 450 to 500 μm can simply beachieved together with integrated tapers guaranteeing lowinsertion losses. These developments open the way to thelow-cost production of compact and low-power-consumingelectro-optical components. As an example, a 200 μm-longfree-standing electro-optical Fabry–Perot is demonstratedwith a figure of merit of only 0.19 V·cm in a 4.5 μm-thickmembrane. |
| Databáze: | OpenAIRE |
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