Light source, mems optical switch, sensor and methods for manufacturing the same
| Autor: | Roald M. Tiggelaar, Erwin Berenschot, Niels Tas, Simen Martinussen, Sonia Garcia-Blanco |
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| Přispěvatelé: | Mesoscale Chemical Systems, MESA+ Institute, Optical Sciences |
| Jazyk: | angličtina |
| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | University of Twente Research Information (Pure Portal) Roald M. Tiggelaar |
| Popis: | The present invention relates to a light source for generating an optical frequency comb. The present invention further relates to a method for manufacturing the optical resonator used in this light source. The present invention additionally relates to microelectromechanical systems, MEMS, optical switch and system comprising the same. The present invention also relates to a sensor and to a method for manufacturing a suspended silicon nitride structure comprised in the sensor. According to the present invention, a single-step LPCVD deposited monolithic stoichiometric Si3N4 layer is used on a mono-crystalline aluminum oxide substrate such as sapphire. The thickness of the Si3N4 layer exceeds 500 nm. This layer can be realized with relatively low residual stress. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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