Micro sized interdigital capacitor for humidity detection based on agarose coating
| Autor: | Vitoria Pascual, Ignacio, Armas, Dayron, Coronel Camones, Carlos Manuel, Ozcariz Celaya, Aritz, Ruiz Zamarreño, Carlos, Matías Maestro, Ignacio |
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| Přispěvatelé: | Nafarroako Unibertsitate Publikoa. ISC - Institute of Smart Cities, Nafarroako Unibertsitate Publikoa. Ingeniaritza Elektriko, Elektroniko eta Telekomunikazio Saila, Universidad Pública de Navarra. Departamento de Ingeniería Eléctrica, Electrónica y de Comunicación |
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: | |
| Zdroj: | Academica-e. Repositorio Institucional de la Universidad Pública de Navarra instname |
| Popis: | A micro sized interdigital capacitor has been proposed for the detection of relative humidity. The photolithography technique enables the fabrication of fingers with a size of 10x500 um. A thin film of agarose functionalizes the sensor for humidity sensing, which improves its performance by 155 times, obtaining a sensitivity of 32.98 pF/%RH. This research was funded by the Ministry of Science, Innovation and Universities of Spain (PRE2020-091797, PEJ2018-002958-P and PID2019-106231RB-I00) and the Institute of Smart Cities PhD Student grants |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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