Silicon moulds of microlenses for different replication techniques

Autor: Albero, J., Nieradko, L., Gorecki, C., Heidi Ottevaere, Virginia Gomez Onate, Sara Van Overmeire, Passily, N., Paivanranta, B., Nieto, D., Flores-Arias, M. T., Gomez-Reino, C.
Přispěvatelé: Applied Physics and Photonics
Jazyk: angličtina
Rok vydání: 2008
Předmět:
Zdroj: Vrije Universiteit Brussel
Popis: A new concept of the fabrication process of si integrated glass microlenses and replication in polymer is presented. They are formed using moulds made by silicon wet etching. The microlenses are fabricated from serveral types of glass and polymer materials, used to replicate by different processes and as a test of the quality of the moulds. A large spectrum of sizes and optical properties can be obtained.
Databáze: OpenAIRE