HEPA liquid filter in Silicon-on-Insulator

Autor:	Kai Kolari, Ari Hokkanen, Toni Paasikallio, Juha-Pekka Pitkänen
Zdroj:	VTT Technical Research Centre of Finland-PURE Kolari, K, Hokkanen, A, Paasikallio, T & Pitkänen, J-P 2010, ' HEPA liquid filter in Silicon-on-Insulator ', Paper presented at 36th International Conference on Micro-and Nano-Engineering, MNE 2010, Genoa, Italy, 19/09/10-22/09/10 .
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::5ac0267f11bf181741d4f1e0efb56551 https://cris.vtt.fi/en/publications/5ef7d7d1-aebc-4f56-b14a-672400acc6dd Zobrazit plný text záznamu