Synthesis of Mg and Zn diolates and their use in metal oxide deposition
| Autor: | Frenzel, P., Preuß, A., Bankwitz, J., Georgi, C., Ganss, F., Mertens, L., Schulz, S., Hellwig, O., Mehring, M., Lang, H. |
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| Přispěvatelé: | Publica |
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
Chemie
Molekül ddc:546 Magnesiumoxid Zinkoxid Rotationsbeschichtung Chemische Gasphasenabscheidung Dampfdruck Thermische Zersetzung Technische Universität Chemnitz Publikationsfonds Magnesium Oxide Zinc Oxide Spin-Coating Chemical Vapor Deposition Vapor Pressure Thermal Decomposition Chemnitz University of Technology Publication funds |
| Zdroj: | RSC Advances 9(2019)19, 10657-10669 |
| Popis: | The synthesis of complexes [M(OCHMeCH₂NMeCH₂)₂] (5, M = Mg; 7, M = Zn) is described. Treatment of MeHNCH2CH2NMeH (1) with 2-methyloxirane (2) gave diol (HOCHMeCH₂NMeCH₂)₂ (3), which upon reaction with equimolar amounts of MR₂ (4, M = Mg, R = Bu; 6, M = Zn, R = Et) gave 5 and 7. The thermal behavior and vapor pressure of 5 and 7 were investigated to show whether they are suited as CVD (= chemical vapor deposition) and/or spin-coating precursors for MgO or ZnO layer formation. Thermogravimetric (TG) studies revealed that 5 and 7 decompose between 80–530 °C forming MgO and ZnO as evidenced by PXRD studies. In addition, TG-MS-coupled experiments were carried out with 7 proving that decomposition occurs by M–O, C–O, C–N and C–C bond cleavages, as evidenced from the detection of fragments such as CH𔔢N+, C₂H𔔢N+, C₂H₅N+, CH₂O+, C₂H₂O+ and C₂H₃O+. The vapor pressure of 7 was measured at 10.4 mbar at 160 °C, while 5 is non-volatile. The layers obtained by CVD are dense and conformal with a somewhat granulated surface morphology as evidenced by SEM studies. In addition, spin–coating experiments using 5 and 7 as precursors were applied. The corresponding MO layer thicknesses are between 7–140 nm (CVD) or 80 nm and 65 nm (5, 7; spin-coating). EDX and XPS measurements confirm the formation of MgO and ZnO films, however, containing 12–24 mol% (CVD) or 5–9 mol% (spin-coating) carbon. GIXRD studies verify the crystalline character of the deposited layers obtained by CVD and the spin-coating processes. |
| Databáze: | OpenAIRE |
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