Comparative analysis of the influence of low-energy hydrogen and helium ion-beam treatments on the structural and electrical properties of CzSi wafers

Autor:	Zinchuk, O., Fedotov, A., Cuong, N. X., Mazanik, A., Krekotsen, N., Ukhov, V., Stas Kov, N., Sotski, A., Sergey Turishchev, Wȩgierek, P.
Zdroj:	ResearcherID Scopus-Elsevier
Databáze:	OpenAIRE
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