Quantitative Electrostatic Force Microscopy-Phase on Silicon Oxide Nanostructures
| Autor: | Albonetti, Cristiano, Chiodini, Stefano, Annibale, Paolo, Stoliar, Pablo, Martínez, Ramsés V., García García, Ricardo, Biscarini, Fabio |
|---|---|
| Přispěvatelé: | European Commission, Ministerio de Ciencia, Innovación y Universidades (España), García García, Ricardo [0000-0002-7115-1928], García García, Ricardo |
| Rok vydání: | 2020 |
| Předmět: | |
| Zdroj: | Digital.CSIC. Repositorio Institucional del CSIC instname |
| Popis: | [EN] Phase-mode electrostatic force microscopy (EFM-Phase) is aviable technique to image surface electrostatic potential ofsilicon oxide stripes fabricated by oxidation scanning probelithography, exhibiting an inhomogeneous distribution of lo-calized charges trapped within the stripes during the electro-chemical reaction. We show here that these nanopatterns areuseful benchmark samples for assessing the spatial/voltageresolution of EFM-phase. To quantitatively extract the rel-evant observables, we developed and applied an analyticalmodel of the electrostatic interactions in which the tip and thesurface are modelled in a prolate spheroidal coordinates sys-tem, fitting accurately experimental data. A lateral resolutionof ∼60 nm, which is comparable to the lateral resolution ofEFM experiments reported in the literature, and a charge res-olution of ∼20 electrons are achieved. This electrostatic anal-ysis evidences the presence of a bimodal population of trappedcharges in the nanopatterned stripes. The authors wish to thank Roberta Nipoti for useful discus-sion and suggestions and NanosensorsTMfor providing EFM tips during the ForceTool project. SPM images were elaboratedwith the software Gwyddion (Neˇcas & Klapetek, 2012), datawere analysed by the GNU General Public Licensed SoftwareQtiPlot and figures are prepared by the GNU General Public Licensed Software Veusz. Analytical and numerical calculiare performed and/or checked by the GNU General Public Li-censed Software Maxima. AFM, EFM-Phase and SEM imageswere collected in the SPM@ISMN facility. The work was sup-ported by EC FP7 ONE-P large-scale project n° 212311, EU-STREP ForceTool (NMP4-CT-2004-STRP 013684), the Ministerio de Ciencia, Investigación e Innovación (MAT2009-08650) and Regione Emilia Romagna ‘PRRIITT PROMINER’ |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|