Evolution of the Si-SiO2 interface characteristics due to preoxidation texturing of silicon surface

Autor:	Gorban, Anatoliy P., Didenko, Pyotr I., Vitaliy Kostylyov, Litovchenko, Vladimir G., Nikolin, Igor B., Romanova, Galina P., Serba, Alexandr A., Chernenko, Vladimir V.
Zdroj:	Scopus-Elsevier
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::4849e73afdc554ed4f4d1211be518a6e http://www.scopus.com/inward/record.url?eid=2-s2.0-0029515080&partnerID=MN8TOARS Zobrazit plný text záznamu