Verification of thickness and surface roughness of a thin film transparent coating
| Autor: | Kamran Mohaghegh, Hans Nørgaard Hansen, Pranov, H., Kofod, G. |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2013 |
| Zdroj: | Mohaghegh, K, Hansen, H N, Pranov, H & Kofod, G 2013, Verification of thickness and surface roughness of a thin film transparent coating . in Proceedings of the 13th euspen International Conference . 13th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen), Berlin, Germany, 27/05/2013 . Technical University of Denmark Orbit |
| Popis: | Thin film coatings are extremely interesting for industries, where there is a need to protect a highly accurate surface which has tight dimensional tolerances. The topic is important both in the production of new metallic tools and repair applications. In both applications it is vital to have a specific knowledge about coating thickness and roughness. In the present paper a novel application of a transparent HSQ coating is presented. Furthermore the thickness and roughness of the transparent coating with nominal thickness of 1 μm is measured in the presence of surface roughness of the substrate. Measurements were done using AFM and a precision 3D mechanical stylus instrument. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|