Dispersion of confined acoustic phonons in ultra-thin silicon membranes
| Autor: | Cuffe, J., Chavez, E., Chapuis, P.O., El Boudouti, E.H., Alzina, F., Dudek, D., Pennec, Yan, Djafari-Rouhani, Bahram, Shchepetov, A., Prunnila, M., Ahopelto, J., Sotomayor-Torres, C.M. |
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| Přispěvatelé: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF) |
| Jazyk: | angličtina |
| Rok vydání: | 2011 |
| Předmět: | |
| Zdroj: | Proceedings of the 7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011 7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011 7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011, 2011, Granada, Spain. pp.125-126 Prunnila, M, Ahopelto, J, Cuffe, J, Chavez, E, Chapuis, P-O, El Boudoti, E H, Alzina, F, Dudek, D, Pennec, Y, Djafari-Rouhani, B, Shchepetov, A & Sotomayor Torres, C M 2011, Dispersion of confined acoustic phonons in ultra-thin silicon membranes . in EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits : Conference Proceedings . Universidad de Granada, pp. 125-126, 7th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2011, Granada, Spain, 17/01/11 . < https://cordis.europa.eu/docs/projects/cnect/3/216373/080/deliverables/001-EUROSOID410.pdf > |
| Popis: | The acoustic phonon dispersion curves of ~10 and ~30 nm Si membranes were measured using Brillouin Light Scattering (BLS) spectroscopy. The dispersion relations of the confined phonons were calculated from a semianalytical model based on continuum elasticity theory. Green’s function simulations were used to simulate both the phonon density of states and Brillouin spectra of themembranes. The effect of the native oxide layer was also considered, and found to affect significantly the dispersion of the higher order modes. |
| Databáze: | OpenAIRE |
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