Study of GaP nucleation layer grown on Si by PE-ALD

Autor:	Gudovskikh, A S, uvarov, A.V., Morozov, I.A., Baranov, Artem, Zelentsov, Kirill S., Kudryashov, D. A., Kalyuzhnyy, N.A., Mintairov, S.A., Kleider, Jean-Paul
Přispěvatelé:	KLEIDER, Jean-Paul, Saint Petersburg Electrotechnical University 'LETI', Saint Petersburg Academic University, Laboratoire Génie électrique et électronique de Paris (GeePs), Université Paris-Sud - Paris 11 (UP11)-CentraleSupélec-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS)
Jazyk:	angličtina
Rok vydání:	2019
Předmět:	[SPI.OPTI] Engineering Sciences [physics]/Optics / Photonic [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics [SPI.NRJ]Engineering Sciences [physics]/Electric power [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics [SPI.MAT] Engineering Sciences [physics]/Materials ComputingMilieux_MISCELLANEOUS [PHYS.COND.CM-MS] Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] [SPI.MAT]Engineering Sciences [physics]/Materials [SPI.NRJ] Engineering Sciences [physics]/Electric power
Zdroj:	E-MRS 2019 Spring Meeting E-MRS 2019 Spring Meeting, May 2019, Marseille, France
Popis:	International audience
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::3f8c195c66964561cccf8a4ac066d6e6 https://hal-centralesupelec.archives-ouvertes.fr/hal-02344049 Zobrazit plný text záznamu