Formation of nanosized particles of silicon carbide and diamonds in surface layer of silicon target during short-pulsed implantation of carbon ions

Autor:	Remnev, G. E., Ivanov, Yu F., Naiden, E. P., Saltymakov, M. S., Andrey Stepanov, Shtanko, V. F.
Zdroj:	Scopus-Elsevier
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::3e47a7d61793e38f242c5f183ed1c3fa http://www.scopus.com/inward/record.url?eid=2-s2.0-84862870630&partnerID=MN8TOARS Zobrazit plný text záznamu