Stiction-controlled locking system for three-dimensional self-assembling microstructures : theory and experimental validation
| Autor: | Agache, Vincent, Buchaillot, Lionel, Collard, Dominique, Quévy, Emmanuel |
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| Přispěvatelé: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF) |
| Jazyk: | angličtina |
| Rok vydání: | 2001 |
| Předmět: | |
| Zdroj: | Proceedings of the SPIE-International Society for Optical Engineering, 4408 Design, Test, Integration and Packaging of MEMS/MOEMS 2001 Design, Test, Integration and Packaging of MEMS/MOEMS 2001, Apr 2001, Cannes, France. pp.344-359 |
| Popis: | The novelty of our study lies in the first controlled use of the phenomenon of stiction to lock three-dimensional self- assembled polysilicon microstructures. The stiction refers to the permanent adhesion of the microstructures to adjacent surfaces. It can occur either during the final stage of the micromachining process, that is to say the releasing of the microstructural material, or after the packaging of the device, due to overrange input signals or electromechanical instability. As a result, we often regard stiction as a major failure issue in the MEMS field of research. This paper reports both the theory of our stiction-controlled locking system operation mode and the validation of our original concept through the stiction-locking of a 3-D self-assembled device |
| Databáze: | OpenAIRE |
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