On the direct bonding of two silicon surfaces: experiments and modeling
| Autor: | Cocheteau, Natacha, Lebon, Frédéric, Rosu, Iulian, Ait Zaid, Sonia, Savin De Larclause, Isabelle |
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| Přispěvatelé: | Lebon, Frédéric, Matériaux et Structures (M&S), Laboratoire de Mécanique et d'Acoustique [Marseille] (LMA ), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), Centre National d'Études Spatiales [Toulouse] (CNES), Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM) |
| Jazyk: | angličtina |
| Rok vydání: | 2012 |
| Předmět: |
[PHYS.MECA.SOLID] Physics [physics]/Mechanics [physics]/Solid mechanics [physics.class-ph]
stomatognathic diseases Silicon direct bonding Surface energy [PHYS.MECA.SOLID]Physics [physics]/Mechanics [physics]/Solid mechanics [physics.class-ph] Modeling [SPI.MECA.SOLID] Engineering Sciences [physics]/Mechanics [physics.med-ph]/Solid mechanics [physics.class-ph] [SPI.MECA.SOLID]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Solid mechanics [physics.class-ph] Finite Elements Roughness |
| Zdroj: | Mechanics of Nano, Micro and Macro Composite Structures Mechanics of Nano, Micro and Macro Composite Structures, Jun 2012, Turin, Italy |
| Popis: | International audience; Silicon direct bonding is a well known process in optic. In this communication we will present principles of molecular adhesion, chemical and mechanical characterization of the interface and a numerical study to predict the mechanical resistance of assemblies. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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