Capteur fil-chaud MEMS à haut rapport d'aspect pour des mesures d'écoulements turbulents en proche paroi, avec une grande sensibilité et un faible consommation d'énergie
| Autor: | Ghouila-Houri, Cécile, Claudel, J., Gerbedoen, J.C., Gallas, Q., Garnier, E., Merlen, A., Viard, R., Talbi, Abdelkrim, Pernod, Philippe |
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| Přispěvatelé: | Laboratoire International associé sur les phénomènes Critiques et Supercritiques en électronique fonctionnelle, acoustique et fluidique (LIA LICS/LEMAC), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), ONERA - The French Aerospace Lab [Palaiseau], ONERA-Université Paris Saclay (COmUE), Département Génie Biologique, Université de Lille, Sciences et Technologies, Fluiditech (Thurmelec) |
| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
MEMS
ANALYSE TURBULENCE CAPTEUR FROTTEMENT PARIÉTAL MEMS HOT-WIRE SENSORS Hardware_INTEGRATEDCIRCUITS WALL SHEAR-STRESS SENSOR CAPTEUR FIL CHAUD TURBULENCE ANALYSIS FLOW CONTROL SEPARATION DETECTION [SPI.MECA.MEFL]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Fluids mechanics [physics.class-ph] |
| Popis: | We present an effcient and high-sensitive micro-electro-mechanical system (MEMS) thermal hot-wire based flow sensor for near wall flow measurement. By combining substreate-free wire structure and mechanical support by silicon oxide micro-bridges, the sensor wires achieve a very high aspect ratio, superior to 300, with 1 mm long for only 3 µm wide. The sensor is designed for compromising conventional hot-film and hot-wire sensors and to achieve high sensitivity to the near wall flow velocity, fast response time and flow direction detection. The sensor can be mounted flush to the wall for technical application, sush as flow control and separation detection, or for understanding near wall shear flows. We present here the design and micro-fabrication, then electrical and thermal characterizations and finally the first experiments in a turbulent boundary layer wind tunnel. |
| Databáze: | OpenAIRE |
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