Response time for optical emission and mass spectrometric signals during etching of heterostructures

Autor:	Thomas Iii, S., Chen, H. H., Stella Pang
Zdroj:	Scopus-Elsevier City University of Hong Kong
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::31568a4d5ecf6f8d6cb15c0d50e6e8fc http://www.scopus.com/inward/record.url?eid=2-s2.0-0029753515&partnerID=MN8TOARS Zobrazit plný text záznamu