In-situ studies of atomic layer deposition studies on high-mobility channel materials

Autor:	Milojevic, M., Sonnet, A. M., Christopher Hinkle, Kim, H. C., Vogel, E. M., Kim, J., Wallace, R. M.
Zdroj:	Scopus-Elsevier
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::2eb7caa13289ec15bdb7531b3443b3e2 http://www.scopus.com/inward/record.url?eid=2-s2.0-74549211872&partnerID=MN8TOARS Zobrazit plný text záznamu