The effect of active species during TiN thin film deposition by the cathodic cage plasma process

Autor:	Daudt, N. D. F., Barbosa, J. C. P., Braz, D. C., Macêdo, M. D. O. C., Pereira, M. B., Clodomiro Alves Junior
Zdroj:	Scopus-Elsevier
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::2bbc190663209698b5ac3f41031d170b http://www.scopus.com/inward/record.url?eid=2-s2.0-84880867017&partnerID=MN8TOARS Zobrazit plný text záznamu