N-Type Conductive Ultrananocrystalline Diamond Films Grown by Hot Filament CVD

Autor: Michael Mertens, Markus Mohr, Neda Wiora, Kai Brühne, Hans-Jörg Fecht
Jazyk: angličtina
Rok vydání: 2015
Předmět:
Zdroj: Journal of Nanomaterials, Vol 2015 (2015)
ISSN: 1687-4110
DOI: 10.1155/2015/527025
Popis: We present the synthesis of ultrananocrystalline diamond (UNCD) films by application of hot filament chemical vapor deposition (HFCVD). We furthermore studied the different morphological, structural, and electrical properties. The grown films are fine grained with grain sizes between 4 and 7 nm. The UNCD films exhibit different electrical conductivities, dependent on grain boundary structure. We present different contact metallizations exhibiting ohmic contact behavior and good adhesion to the UNCD surface. The temperature dependence of the electrical conductivity is presented between −200 and 900°C. We furthermore present spectroscopic investigations of the films, supporting that the origin of the conductivity is the structure and volume of the grain boundary.
Databáze: OpenAIRE