Study of wet chemical etching of AlxGa1-xInP2 films using hydrochloric acid
| Autor: | Deelen, J. van, Mulder, P., Bauhuis, G.J., Niftrik, A.T.J. van, Haverkamp, E., Schermer, J.J., Larsen, P.K. |
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| Rok vydání: | 2006 |
| Předmět: | |
| Zdroj: | Journal of the Electrochemical Society, 153, 6, pp. C442-C448 Journal of the Electrochemical Society, 153, C442-C448 |
| ISSN: | 0013-4651 |
| Popis: | Contains fulltext : 35375.pdf (Publisher’s version ) (Closed access) |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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