H∞ Loop shaping control for PLL-based mechanical resonance tracking in NEMS resonant mass sensors

Autor: Kharrat, Chady, Colinet, Eric, Voda, Alina
Přispěvatelé: Laboratoire MEMS et Electronique Associée (LMEA), Commissariat à l'énergie atomique et aux énergies alternatives (CEA), GIPSA - Systèmes linéaires et robustesse (GIPSA-SLR), Département Automatique (GIPSA-DA), Grenoble Images Parole Signal Automatique (GIPSA-lab), Université Stendhal - Grenoble 3-Université Pierre Mendès France - Grenoble 2 (UPMF)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Stendhal - Grenoble 3-Université Pierre Mendès France - Grenoble 2 (UPMF)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Grenoble Images Parole Signal Automatique (GIPSA-lab), Université Stendhal - Grenoble 3-Université Pierre Mendès France - Grenoble 2 (UPMF)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Stendhal - Grenoble 3-Université Pierre Mendès France - Grenoble 2 (UPMF)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS), Université Pierre Mendès France - Grenoble 2 (UPMF)-Université Stendhal - Grenoble 3-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Pierre Mendès France - Grenoble 2 (UPMF)-Université Stendhal - Grenoble 3-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Grenoble Images Parole Signal Automatique (GIPSA-lab), Université Pierre Mendès France - Grenoble 2 (UPMF)-Université Stendhal - Grenoble 3-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Pierre Mendès France - Grenoble 2 (UPMF)-Université Stendhal - Grenoble 3-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)
Jazyk: angličtina
Rok vydání: 2008
Předmět:
Zdroj: Proceedings of the IEEE SENSORS 2008 Conference
IEEE SENSORS 2008 Conference
IEEE SENSORS 2008 Conference, Oct 2008, Lecce, Italy. pp.1135-1138, ⟨10.1109/ICSENS.2008.4716641⟩
DOI: 10.1109/ICSENS.2008.4716641⟩
Popis: International audience; Abstract--A simple dynamic detection of the resonance frequency shift in NEMS resonant mass sensors is described. This is done without the use of an external frequency sweep signal nor a frequency counter limiting the dynamic variation detection. Neither an amplitude control nor a phase switcher is required for maintaining the resonant oscillations. The sensor is driven directly by the VCO's output for which the control signal is calculated by a robust H∞ controller using loopshaping method. Only the sensor and the VCO's signals signs are detected and compared so that the controller regulates the phase difference between them, maintaining it at π / 2 which occurs on resonance frequency. The measurement issue is transformed to a novel control problem that rejects the disturbance described by the resonance frequency shift, attenuates the phase noise and guarantees good stability margins.
Databáze: OpenAIRE