Poly (dimethylsiloxane-b-methyl methacrylate): A Promising Candidate for Sub-10 nm Patterning

Autor: Luo, Yingdong, Montarnal, Damien, Kim, Sangwon, Shi, Weichao, Barteau, Katherine P, Pester, Christian W, Hustad, Phillip D, Christianson, Matthew D, Fredrickson, Glenn H, Kramer, Edward J, Hawker, Craig J
Přispěvatelé: Materials Research Laboratory (MRL), University of California [Santa Barbara] (UCSB), University of California-University of California, Materials Research Laboratory, The Dow Chemical Company
Jazyk: angličtina
Rok vydání: 2015
Předmět:
Zdroj: Macromolecules
Macromolecules, American Chemical Society, 2015, 48 (11), pp.3422--3430
ISSN: 0024-9297
1520-5835
Popis: International audience; no abstract
Databáze: OpenAIRE