Poly (dimethylsiloxane-b-methyl methacrylate): A Promising Candidate for Sub-10 nm Patterning
Autor: | Luo, Yingdong, Montarnal, Damien, Kim, Sangwon, Shi, Weichao, Barteau, Katherine P, Pester, Christian W, Hustad, Phillip D, Christianson, Matthew D, Fredrickson, Glenn H, Kramer, Edward J, Hawker, Craig J |
---|---|
Přispěvatelé: | Materials Research Laboratory (MRL), University of California [Santa Barbara] (UCSB), University of California-University of California, Materials Research Laboratory, The Dow Chemical Company |
Jazyk: | angličtina |
Rok vydání: | 2015 |
Předmět: | |
Zdroj: | Macromolecules Macromolecules, American Chemical Society, 2015, 48 (11), pp.3422--3430 |
ISSN: | 0024-9297 1520-5835 |
Popis: | International audience; no abstract |
Databáze: | OpenAIRE |
Externí odkaz: |