RF MEMS ohmic switches for matrix configurations
| Autor: | De Angelis, G., Lucibello, A., Casini, F., Farinelli, Paola, Mannocchi, G., Di Nardo, S., Margesin, B., Giacomozzi, F., Vendier, O., Vietzorreck, L., Proietti, E., Marcelli, R. |
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| Jazyk: | angličtina |
| Rok vydání: | 2010 |
| Předmět: | |
| Zdroj: | 11th International Symposium on RF MEMS and RF Microsystems, paper MEMS_S1_2, MEMSWAVE 2010, Otranto, June 28-29-30, 2010 info:cnr-pdr/source/autori:G. De Angelis, A. Lucibello, F. Casini, P. Farinelli, G. Mannocchi, S. Di Nardo, B. Margesin, F. Giacomozzi, O. Vendier, L.Vietzorreck, E. Proietti, and R. Marcelli/congresso_nome:11th International Symposium on RF MEMS and RF Microsystems, paper MEMS_S1_2, MEMSWAVE 2010/congresso_luogo:Otranto/congresso_data:June 28-29-30, 2010/anno:2010/pagina_da:/pagina_a:/intervallo_pagine |
| Popis: | Two different topologies of RF MEMS series ohmic switches (cantilever and clamped - clamped beams) in Coplanar Waveguide (CPW) configuration have been characterized by means of DC, environmental and RF measurements. The devices have been manufactured on High Resistivity (HR) Silicon substrates, as building blocks to be implemented in different Single-Pole 4-Throw (SP4T), Double-Pole Double-Throw (DPDT) configurations and then integrated in LTCC technology for the realization of Large Order Clos 3D networks. |
| Databáze: | OpenAIRE |
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