Full 3D characterization of high aspect ratio microstructures

Autor:	Frederik Stöhr, Jonas Michael-Lindhard, Hugh Simons, Jörg Hübner, Flemming Jensen, Ole Hansen, Henning Friis Poulsen, Jørgen Garnæs
Jazyk:	angličtina
Rok vydání:	2014
Zdroj:	Stöhr, F, Michael-Lindhard, J, Simons, H, Hübner, J, Jensen, F, Hansen, O, Poulsen, H F & Garnæs, J 2014, ' Full 3D characterization of high aspect ratio microstructures ', 40th International Conference on Micro and Nano Engineering, Lausanne, Switzerland, 22/09/2014-26/09/2014 . Technical University of Denmark Orbit
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::1dca25f32a78abfd787c41cf294d1ff2 https://orbit.dtu.dk/en/publications/e798e881-421b-4817-a992-b2abcdd02b9f Zobrazit plný text záznamu