Sol-Gel Based Direct Photolitography : Principle and Applications

Autor:	Riassetto, David, Bonnel, Morgane, Langlet, Michel
Přispěvatelé:	Laboratoire des matériaux et du génie physique (LMGP ), Institut National Polytechnique de Grenoble (INPG)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Riassetto, David
Jazyk:	angličtina
Rok vydání:	2019
Předmět:	[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] [PHYS.COND.CM-MS] Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ComputingMilieux_MISCELLANEOUS
Zdroj:	International Congress on Advanced Materials sciences and Engeering International Congress on Advanced Materials sciences and Engeering, Jul 2019, Osaka, Japan
Popis:	International audience
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::1d0354d243dfa3ff48fd8439f1aa72fd https://hal.univ-grenoble-alpes.fr/hal-02369412 Zobrazit plný text záznamu