| Autor: |
Nag, M., Bhoolokam, A., Smout, S., Willegems, M., Muller, R., Myny, K., Schols, S., Ameys, M., Genoe, J., Ke, T.H., Vicca, P., Ellis, T., Cobb, B., Kumar, A., Steen, J.L.P.J. van der, Gelinck, G., Fukui, Y., Obata, K., Groeseneken, G., Heremans, P., Steudel, S. |
| Jazyk: |
angličtina |
| Rok vydání: |
2015 |
| Předmět: |
|
| Zdroj: |
Journal of the Society for Information Display, 10, 22, 509-517 |
| Popis: |
A process to make self-aligned top-gate amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistors (TFTs) on polyimide foil is presented. The source/drain (S/D) region's parasitic resistance reduced during the SiN interlayer deposition step. The sheet resistivity of S/D region after exposure to SiN interlayer deposition decreased to 1.5 kΩ/□. TFTs show field-effect mobility of 12.0 cm2/(V.s), sub-threshold slope of 0.5 V/decade, and current ratio (I ON/OFF) of >107. The threshold voltage shifts of the TFTs were 0.5 V in positive (+1.0 MV/cm) bias direction and 1.5 V in negative (-1.0 MV/cm) bias direction after extended stressing time of 104 s. We achieve a stage-delay of ~19.6 ns at V-DD = 20 V measured in a 41-stage ring oscillator. A top-emitting quarter-quarter-video-graphics-array active-matrix organic light-emitting diode display with 85 ppi (pixels per inch) resolution has been realized using only five lithographic mask steps. For operation at 6 V supply voltage (V-DD), the brightness of the display exceeds 150 cd/m2. A process to make self-aligned top-gate amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistors (TFTs) is presented. TFTs show field-effect mobility of 12.0 cm2/(V.s), sub-threshold slope of 0.5 V/decade, and current ratio (I ON/OFF) of over 107. In applications, a 41-stage ring oscillator with a stage-delay of ~19.6 ns (at V-DD = 20 V) and a top-emitting quarter-quarter-video-graphics-array (QQVGA) active-matrix organic light-emitting diode (AMOLED) display with 85 ppi (pixels per inch) resolution using five lithographic mask steps have been realized on a polyimide foil. Copyright 2015 Society for Information Display. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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