Transport and confinement of silicon in Ti-Si-N coatings in the course of vacuum-arc deposition

Autor:	Aksenov, I. I., Belous, V. A., Goltvyanitsa, S. K., Goltvyanitsa, V. S., Zadneprovsky, Y. A., Aleksander Kuprin, Lomino, N. S., Sobol, O. V.
Zdroj:	Scopus-Elsevier
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::16d6bd5ec2adbdec935886ad7dfb429b http://www.scopus.com/inward/record.url?eid=2-s2.0-78549287091&partnerID=MN8TOARS Zobrazit plný text záznamu