Processing challenges in the fabrication of advanced MEMS

Autor:	Kornblit, A., Vladimir Aksyuk, Bogart, G. R., Bolle, C., Bower, J. E., Cirelli, R. A., Ferry, E., Fetter, L., Gasparyan, A., Greywall, D. S., Keller, R. C., Klemens, F. P., Lai, W. Y. -C, Lopez, O. D., Mansfield, W. M., Miner, J. F., Pai, C. -S, Pardo, F., Pau, S., Simon, M. E., Sorsch, T., Taylor, J. A., Tennant, D. M., Watson, G. P.
Zdroj:	Scopus-Elsevier
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::1671b510e51eb59524aff41b5c74b7ef http://www.scopus.com/inward/record.url?eid=2-s2.0-20144388180&partnerID=MN8TOARS Zobrazit plný text záznamu