(poster) Stability of the Surface Passivation Properties of Atomic Layer Deposited Aluminum Oxide in Damp Heat Conditions

Autor:	Ismo T. S. Rauha, Ville Vähänissi, Hele Savin
Zdroj:	Aalto University
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::11e0d4296881e04884ba6916129ce94d https://research.aalto.fi/en/publications/6d0c8d7a-7b8a-416f-af64-b276bffafb15 Zobrazit plný text záznamu