Mechanism of AIN film formation at thermochemical nitridization of sapphire
Autor: | Kaltaev, K. S. -O, Nizhankovskiy, S. V., Sidelnikova, N. S., Rom, M. A., Danko, A. Y., Mariya Dobrotvorskaya, Belyaev, A. Y., Strelchuk, V. V., Kolomys, A. F. |
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Zdroj: | Scopus-Elsevier |
Databáze: | OpenAIRE |
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