High temperature printed micro-hotplate on polyimide foil for gas sensing and sampling

Autor: Camara, El Hadji Malick, Rieu, Mathilde, Briand, Danick, Breuil, Philippe, Pijolat, Christophe, Viricelle, Jean-Paul
Přispěvatelé: IMT Neuchâtel (IMT), Université de Neuchâtel (UNINE)-IMT, Laboratoire Georges Friedel (LGF-ENSMSE), École des Mines de Saint-Étienne (Mines Saint-Étienne MSE), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT)-Université de Lyon-Centre National de la Recherche Scientifique (CNRS), Centre Sciences des Processus Industriels et Naturels (SPIN-ENSMSE), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Procédés et REactivité des Systèmes Solide-gaz, Instrumentation et Capteurs (PRESSIC-ENSMSE), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT)-SPIN, Ecole Polytechnique Fédérale de Lausanne (EPFL)-Institute of Microengineering (IMT)-Sensors Actuators and Microsystems Laboratory (SAMLAB, Toucas, Andrée-Aimée
Jazyk: angličtina
Rok vydání: 2015
Předmět:
Zdroj: ISOEN 2015 (16th International Symposium on Olfaction and Electronic Noses )
ISOEN 2015 (16th International Symposium on Olfaction and Electronic Noses ), Jun 2015, Dijon, France
Popis: International audience; Hybrid integration of different components (sampling/filtering, separation and detection) prevails in miniaturized analytical instruments for more selectivity and sensitivity. In this purpose, we report on flexible micro-hotplates usable for gas preconcentration and gas sensing. Our micro-hotplate is made on foil by using inkjet printing. Our technology provides flexibility in the design and paves the way for a new generation of cost-effective analytical instruments. Compared to previous work on Polyethylene Naphthalate (PEN) with silver as electrical conductor, it allows operating at high temperatures (up to 400˚C) thanks to the combination of gold nanoparticles-based heater and polyimide foil substrate. The foil gas preconcentrator is obtained by depositing an adsorbent onto of the foil hotplate whereas the fully printed metal oxide (MOX) sensor is implemented by inkjet-printing gold interdigitated electrodes covered by a metal oxide sensing layer. The Gas preconcentrator and the MOX sensor were successfully tested under benzene and carbon monoxide, respectively.
Databáze: OpenAIRE