BORON DISTRIBUTION IN SILICON AFTER EXCIMER LASER ANNEALING WITH MULTIPLE PULSES

Autor:	E.V. Monakhov, B.G. Svensson, M.K. Linnarsson, A. La Magna, M. Italia, V. Privitera, G. Fortunato, L. Mariucci
Rok vydání:	2005
Zdroj:	European Materials Research Society, Strasbourg, 2005 info:cnr-pdr/source/autori:E.V. Monakhov and B.G. Svensson, M.K. Linnarsson, A. La Magna, M. Italia and V. Privitera, G. Fortunato and L. Mariucci/congresso_nome:European Materials Research Society/congresso_luogo:Strasbourg/congresso_data:2005/anno:2005/pagina_da:/pagina_a:/intervallo_pagine
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=cnr_________::67a2e04fbf3651fe8938125fcffbda94 https://publications.cnr.it/doc/115599 Zobrazit plný text záznamu