Field-effect Transistor Devices Based on Strained Si Channels Above Buried 2D Periodic SiGe Quantum Dots

Autor: Hrauda, Nina, Etzelstorfer, Tanja, Strangl, Julian, Carbone, Dina, Bauer, Guenther, Biasotto, Cleber, Jovanović, Vladimir, Nanver, Lis, Moers, Juergen, Gruetzmacher, Detlev
Jazyk: angličtina
Rok vydání: 2010
Předmět:
Popis: Field-effect transistors are fabricated in the Si channels grown over the self-assembled SiGe dots. Si channels are under the biaxial strain which increases electron mobility resulting in higher drain currents.
Databáze: OpenAIRE