Microelectromechanical components in electrical metrology
| Autor: | Manninen, Antti, Kärkkäinen, Anu, Pesonen, Nadine, Oja, A., Seppä, Heikki |
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| Jazyk: | francouzština |
| Rok vydání: | 2007 |
| Zdroj: | Manninen, A, Kärkkäinen, A, Pesonen, N, Oja, A & Seppä, H 2007, Applications des MEMS à la métrologie électrique . in Techniques de l'Ingénieur, traité Mesures et Controle . vol. RE2, R 1002, Techniques de l'Ingénieur . < https://www.techniques-ingenieur.fr/base-documentaire/mesures-analyses-th1/grandeurs-electriques-a-mesurer-42417210/applications-des-mems-a-la-metrologie-electrique-r1002/ > |
| Popis: | Microelectromechanical systems (MEMS) provide great potential for metrology and precision electric instrumentation. In addition to their small bulk, low consumption and reduced cost in mass production, they also offer good stability and lower 1/f noise. In practice however, the stability of MEMS components is often limited by electrostatic field effects on surfaces and interfaces, as well as on dielectric layers. Ongoing research is trying to address this issue. |
| Databáze: | OpenAIRE |
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