Autor: |
Metev, S.M., Ozegowski, M., Meteva, K., Sepold, G., Kononenko, T.V., Konov, V.I., Obraztsova, E.D., Pimenov, S.M., Ralchenko, V.G., Smolin, A.A. |
Zdroj: |
Diamond and Related Materials; April 1996, Vol. 5 Issue: 3-5 p420-424, 5p |
Abstrakt: |
UV laser irradiation has been found to influence significantly the growth process of a-C:H films and to result in a modification of the film properties. Up to 2 μm thick, defect-free films have been synthesized. The optical and mechanical film properties are changed as a function of the laser energy density. Especially noteworthy is a significant increase in the film microhardness. At 60 GPa it reaches a value which is twice as high as that observed for unirradiated films. The laser-induced structural transformations in a-C:H films have been studied by Raman spectroscopy. |
Databáze: |
Supplemental Index |
Externí odkaz: |
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