| Autor: |
Kopilets, I.A., Kondratenko, V.V., Fedorenko, A.I., Zubarev, E.N., Poltseva, O.V., Ponomarenko, A.G., Lyakhovskaya, I.I. |
| Zdroj: |
Journal of X-Ray Science and Technology; June 1996, Vol. 6 Issue: 2 p141-149, 9p |
| Abstrakt: |
Structural, phase, and chemical stabilities of x-ray multilayer mirrors Mo–(B + C) with periods in the range 8–11.5 nm were studied at temperatures of 250–1100°C by small-angle and large-angle x-ray diffraction and electron microscopy methods. Two amorphizations at ∼450 and ∼750°C and two crystallizations at ∼650 and ∼850°C of Mo-based layers were observed, which were due to the formation of the molybdenum carbides MoC (hex), γ-MoC, and Mo2C instead of the metal Mo, and to the formation of the molybdenum borides MoB2and Mo2B5instead of molybdenum carbides, respectively. Both amorphizations of Mo-based layers were accompanied by smoothing of interfaces and by an increase of the multilayer x-ray reflectivity at λ = 0.154 nm. Both crystallizations of Mo-based layers promoted the development of interface roughness and a decrease of multilayer x-ray reflectivity. The destruction of Mo–(B + C) multilayers at ∼1100°C was caused by the recrystallization of Mo2B5layers. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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